JPH0546273Y2 - - Google Patents
Info
- Publication number
- JPH0546273Y2 JPH0546273Y2 JP7917290U JP7917290U JPH0546273Y2 JP H0546273 Y2 JPH0546273 Y2 JP H0546273Y2 JP 7917290 U JP7917290 U JP 7917290U JP 7917290 U JP7917290 U JP 7917290U JP H0546273 Y2 JPH0546273 Y2 JP H0546273Y2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- supply
- turntable
- constant temperature
- intermediate chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005192 partition Methods 0.000 claims description 16
- 238000012360 testing method Methods 0.000 claims description 8
- 238000000638 solvent extraction Methods 0.000 claims description 2
- 238000009413 insulation Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000005494 condensation Effects 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7917290U JPH0546273Y2 (en]) | 1990-07-25 | 1990-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7917290U JPH0546273Y2 (en]) | 1990-07-25 | 1990-07-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0438046U JPH0438046U (en]) | 1992-03-31 |
| JPH0546273Y2 true JPH0546273Y2 (en]) | 1993-12-03 |
Family
ID=31623099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7917290U Expired - Lifetime JPH0546273Y2 (en]) | 1990-07-25 | 1990-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0546273Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014062765A (ja) * | 2012-09-20 | 2014-04-10 | Ueno Seiki Co Ltd | 部品検査装置 |
-
1990
- 1990-07-25 JP JP7917290U patent/JPH0546273Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0438046U (en]) | 1992-03-31 |
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